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Interferometric systems are the first choice, whenever surfaces need to be measured with highest possible precision.

Together with our partner company nortus-Systronic GmbH we offer a phase-shifting point diffraction common path interferometer for ultra high accuracy measurements of surface form and transmitted wavefront quality.

These system allow to determine absolute figures of a surface or wavefront: the measured form is counted from the absolute reference i.e. perfect spherical wavefront produced by diffraction of light by a sub-wavelength aperture.

The approach allows for unpredecendented precision:

  • Peak-to-valley absolute accuracy: ± 0.6 nm
  • Peak-to-valley resolution: 0.05 nm
  • Wavefront RMS repeatability: < 0.23 nm