Interferometric systems are the first choice, whenever surfaces need to be measured with highest possible precision.
Together with our partner company nortus-Systronic GmbH we offer a phase-shifting point diffraction common path interferometer for ultra high accuracy measurements of surface form and transmitted wavefront quality.
These system allow to determine absolute figures of a surface or wavefront: the measured form is counted from the absolute reference i.e. perfect spherical wavefront produced by diffraction of light by a sub-wavelength aperture.
The approach allows for unpredecendented precision:
- Peak-to-valley absolute accuracy: ± 0.6 nm
- Peak-to-valley resolution: 0.05 nm
- Wavefront RMS repeatability: < 0.23 nm